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Search Results: Micro-opto-electro-mechanical systems

Micromachines, such as micro-electro-mechanical systems (MEMS) and micro-opto-electro-mechanical systems (MOEMS), are beginning to affect almost...


= Encyclopedia Article; = Research Update
Figure 1.Silicon-fabricated MEMS device (a) before the release step, and (b) after the release step.
Figure 2.Optical modulator: (a) trampoline structure, and (b) packaged device.
Figure 3.A 1 × 2 optical switch. The structure between the three optical fibers is the mirror.
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