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The latest generation of semiconductor factories incorporates very advanced automation systems primarily due to their unique manufacturing...



= Encyclopedia Article; = Research Update
Figure 1.Cross-sectional view of a 300-mm fully automated factory showing tall central aisles for storage and multiple levels of interbay and intrabay transport systems.
Figure 2.Number of nonproprietary (open) standards that were used to successfully create a fully automated semiconductor production line.
Figure 3.High-level view of the integrated automation capabilities that manage production control, dispatching, and process control functions.