Micromachined ultrasonic transducers
Khuri-Yakub, Butrus T. E. L. Ginzton Laboratory, Department of Electrical Engineering, Stanford University, Stanford, California.
Oralkan, Ömer E. L. Ginzton Laboratory, Department of Electrical Engineering, Stanford University, Stanford, California.
Kupnik, Mario E. L. Ginzton Laboratory, Department of Electrical Engineering, Stanford University, Stanford, California.
- Structure and operating principle
- Fabrication processes
- Links to Primary Literature
The name “micromachined ultrasonic transducer (MUT)” is used for devices that are made using microfabrication techniques to generate and detect ultrasound. Although this general term also applies to transducers made by shaping bulk piezoelectric materials using micromachining techniques, the more specific definition refers to devices with tiny membranes that are driven by either capacitive or piezoelectric actuation. The advent of both capacitive and piezoelectric micromachined ultrasonic transducers, cMUTs and pMUTs, respectively, has been made possible by advances in integrated circuit fabrication technology. This article focuses particularly on cMUTs.
The content above is only an excerpt.
for your institution. Subscribe
To learn more about subscribing to AccessScience, or to request a no-risk trial of this award-winning scientific reference for your institution, fill in your information and a member of our Sales Team will contact you as soon as possible.
to your librarian. Recommend
Let your librarian know about the award-winning gateway to the most trustworthy and accurate scientific information.
AccessScience provides the most accurate and trustworthy scientific information available.
Recognized as an award-winning gateway to scientific knowledge, AccessScience is an amazing online resource that contains high-quality reference material written specifically for students. Its dedicated editorial team is led by Sagan Award winner John Rennie. Contributors include more than 9000 highly qualified scientists and 42 Nobel Prize winners.
MORE THAN 8500 articles and Research Reviews covering all major scientific disciplines and encompassing the McGraw-Hill Encyclopedia of Science & Technology and McGraw-Hill Yearbook of Science & Technology
115,000-PLUS definitions from the McGraw-Hill Dictionary of Scientific and Technical Terms
3000 biographies of notable scientific figures
MORE THAN 17,000 downloadable images and animations illustrating key topics
ENGAGING VIDEOS highlighting the life and work of award-winning scientists
SUGGESTIONS FOR FURTHER STUDY and additional readings to guide students to deeper understanding and research
LINKS TO CITABLE LITERATURE help students expand their knowledge using primary sources of information